Professor Luh-Maan Chang got his BS degree from the Department of Civil Engineering, National Cheng-Kung University in 1971. In 1974-77, Professor Chang worked as a project engineer for Industry Technology Research Institute (ITRI) at Hsing-Chu, the Silicon Valley of Taiwan where he helped design and build the 1st Integrated Circuit Demonstration Plant of Taiwan. After getting his MS and PhD degrees from the University of Texas at Austin, he taught in the School of Building Construction, University of Florida from 1983 to 1985.From 1986 to 2009, Professor Chang taught in the School of Civil Engineering, Purdue University. After he took early retirement from Purdue, he continued teaching in the Civil Engineering Department of National Taiwan University till 2016. Presently, he is an adjunct professor and the director of High-Tech Facility Research Center of NTU Civil Engineering Department. a full-time researcher of NTU Climate Change, Disaster and Sustainability Research Center, His current research interests are in Mitigation of Vibration (Micro-vibration & Electromagnetic Interference) & Contamination Control for below 2nm Semiconductor Fabrication (Fab) process, 4D Construction Project Scheduling through Fab/Facility Information Modeling (FIM), and Artificial Intelligence (AI) for Improving Construction Productivity.
High-Tech continuously brings forth improved technology, knowledge, economy, and quality of human life. To advance high-tech, facility is a part of and prerequisite to the manufacturing & R&D. In a semiconductor chip fabrication plant (fab,) high performance manufacturing tools, precision instruments and ultrapure utilities are needed for semiconductor chips manufacturing. Its processes must be performed in a stringently controlled environment for mitigating the vibration and contamination. Moreover, these thousands of tools, instruments and equipment must be housed in a resilient structure supported by a solid foundation. Otherwise, amplified vibration may arise from seismic activity, noise, electromagnetic waves (EMI), radio frequency (RF), airflow, and machine resonance. The vibration not only affects manufacturing yielding rate but also could cause severe damage to properties and harmful to onsite worker or fab operators. these need to be properly addressed.